The CX-600 Parylene Coater is a low-temperature CVD coating machine with a reactor volume of 600 L for the production of parylene thin films . It is fully automated and integrates surface activation processes.
The CX-600 can be integrated into production lines for electronic or medical devices or semiconductors. The machine can be easily connected to clean rooms.
The CVD Parylene coater is also available in smaller versions ( CX-30 and CX-300 ).

CX-600 was developed by COAT-X for the production of high-quality parylene protective coatings . It is the result of more than 10 years of intensive research and development. CX-600 produces high-quality, pinhole-free parylene protective coatings from 100 nm to 40 µm with very precise deposition rate control.
Parylene thin films produced with the CX-600 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility, and chemical stability.
The CX-600 is a low-temperature CVD coating machine specifically designed for the deposition of thin parylene films. It integrates:
The CX-600 is a compact Parylene coater, it can be easily integrated into a production line, its footprint is:
Usable volume for coating:
The following options are available for the CX-600:
Consumables for parylene deposition can be purchased from COAT-X, such as Parylene-C, Parylene-VT4 and Parylene-AF4 dimer granules or ceramic precursors.
The CX-600 produces hermetic Parylene thin films to protect sensitive products from moisture, such as:
In addition, the Parylene thin film provides a biocompatible surface for implantable devices such as
COAT-X takes care of:
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