CX-600 Parylene Coater

Large CVD coating machine for producing parylene thin films

The CX-600 Parylene Coater is a low-temperature CVD coating machine with a reactor volume of 600 L for the production of parylene thin films . It is fully automated and integrates surface activation processes.

The CX-600 can be integrated into production lines for electronic or medical devices or semiconductors. The machine can be easily connected to clean rooms.

The CVD Parylene coater is also available in smaller versions ( CX-30 and CX-300 ).

Large parylene coater CX-600 by COAT-X for parylene thin films
Large parylene coater CX-600 by COAT-X for parylene thin films

CX-600 was developed by COAT-X for the production of high-quality  parylene protective coatings  . It is the result of more than 10 years of intensive research and development. CX-600 produces high-quality, pinhole-free parylene protective coatings from 100 nm to 40 µm with very precise deposition rate control.

Parylene thin films produced with the CX-600 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility, and chemical stability.

KEY FEATURES

The CX-600 is a low-temperature CVD coating machine specifically designed for the deposition of thin parylene films. It integrates:

  • Evaporator oven
  • Pyrolysis furnace with quartz tube
  • Front loader separation chamber
  • Large turntable
  • Injection of adhesion promoter
  • Cold traps
  • Pump units
  • Regulatory unit
  • Human-machine interface software
  • PC and screen on adjustable arm
SYSTEM SPECIFICATIONS

The CX-600 is a compact Parylene coater, it can be easily integrated into a production line, its footprint is:

  • Length 2.3m
  • Width 1.6 m
  • Height 2.0 m

 

Usable volume for coating:

  • Diameter 600 mm
  • Height 1200 mm
AVAILABLE OPTIONS

The following options are available for the CX-600:

  • Oxygen plasma activation
  • PE_CVD module for the deposition of multilayer composite thin films of parylene and ceramic.
  • Automatic nitrogen refill
  • Thermoregulated reactor chamber
  • Interface to the cleanroom
  • Specific coating device

 

Consumables for parylene deposition can be purchased from COAT-X, such as Parylene-C, Parylene-VT4 and Parylene-AF4 dimer granules or ceramic precursors.

APPLICATIONS

The CX-600 produces hermetic Parylene thin films to protect sensitive products from moisture, such as:

  • Printed circuit boards (PCB and PCBA)
  • Sensors and actuators
  • MEMS
  • LEDs
  • Medical devices

 

In addition, the Parylene thin film provides a biocompatible surface for implantable devices such as

  • Cardiovascular stents
  • Cardiac monitoring systems
  • Control of intraocular pressure
  • Intragastric balloon
SERVICES

COAT-X takes care of:

  • Development of an optimal coating formulation
  • Design and production of coating devices
  • Supply of consumables and spare parts
  • FAT and SAT qualifications
  • Support with process validation
  • Repair and service on request
  • Worldwide delivery

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