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CX-600 Parylene Coater

Large size CVD coating machine for the production of Parylene thin films

The CX-600 Parylene coater is low temperature CVD coating machine with a reactor volume of 600L to produce Parylene thin films. It is fully automated and integrates surface activation processes.

CX-600 can be integrated in production lines for electronic or medical devices or semiconductors. The machine can easily be coupled to clean rooms.

The CVD Parylene coater is also available in smaller (CX-30 and CX-300) designs.

Large parylene coater CX-600 by COAT-X for parylene thin films
Large parylene coater CX-600 by COAT-X for parylene thin films

CX-600 has been designed by COAT-X for the production of high quality Parylene conformal coatings. It is the results of more than 10 years of intense research and development. CX-600 produces high quality pinhole-free Parylene conformal coatings from 100 nm up to 40um with very precise control over deposition rate.

Parylene thin films produced with the CX-600 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility and chemical stability.


CX-600 is a low temperature CVD coating machine specifically designed for the deposition of Parylene thin films, it integrates:

  • Evaporator furnace
  • Pyrolysis oven with quartz tube
  • Front loading deposition chamber
  • Deposition turn table
  • Injection of adhesion promoter
  • Cold traps
  • Pump units
  • Regulation unit
  • Human Machine Interface Software
  • PC and screen on adjustable arm

The CX-600 is a compact Parylene coater, it can be easily integrated in a production line, its footprint is:

  • Length  2.3 m
  • Width   1.6 m
  • Height  2.0 m


Useful volume for coating process:

  • Diameter   600 mm
  • Height       1200 mm

Following options are available for the CX-600:

  • Oxygen plasma activation
  • PE_CVD module for the deposition of composite multilayer thin films of Parylene and Ceramics.
  • Automated nitrogen refill
  • Thermo regulated reactor chamber
  • Interface to clean room
  • Specific coating fixture


Consumables for the Parylene deposition can be purchased by COAT-X, like Parylene-C, Parylene-VT4 and Parylene-AF4 dimer granules or ceramic precursors.


The CX-600 produces Parylene hermetic thin films to protect sensitive products against moisture like:

  • Printed circuit boards (PCB and PCBA)
  • Sensors and actuators
  • MEMS
  • LED's
  • Medical devices


In addition Parylene thin film provides biocompatible surface to implantable devices, like

  • Cardiovascular stents
  • Heart monitoring systems
  • Intra-ocular pressure control
  • Intra-gastric balloon

COAT-X takes care of:

  • Development of an optimal coating recipe
  • Design and production of coating fixtures
  • Supply of consumables and spare parts
  • FAT and SAT qualification
  • Support for process validation
  • On-demand repair and service
  • Worldwide delivery

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