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CX-30 Parylene Coater

Small size CVD coating machine for the production of Parylene thin films

CX-30 Parylene coater is a low temperature CVD coating machine with 30L reactor volume to produce Parylene thin films. It is fully automated and incorporates surface activation processes.

The CX-30 can be integrated into production lines for electronic or medical devices or semiconductors. The machine can easily be coupled to clean rooms.

The Parylene CVD coater is also available in larger models (CX-300 and CX-600).

Small parylene coater CX-30 by COAT-X for parylene thin films
Small parylene coater CX-30 by COAT-X for parylene thin films

CX-30 was designed by COAT-X for the production of high quality parylene conformal coatings. It is the result of more than 10 years of intense research and development. CX-30 produces high quality, flawless parylene conformal coatings from 100 nm to 40 µm with very precise deposition rate control.

Parylene thin films produced with CX-30 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility and chemical stability.


CX-30 is a low temperature CVD coating machine specifically designed for the deposition of thin layers of Parylene, it integrates:

  • Evaporator oven
  • Pyrolysis furnace with quartz tube
  • Front loading deposition chamber
  • Deposition turntable
  • Injection of adhesion promoter
  • Cold traps
  • Pumping units
  • Control unit
  • Human Machine Interface Software
  • PC and screen on adjustable arm

The CX-30 is a compact Parylene machine, it fits easily into a production line, its size is:

  • Length 1.9m
  • Width 0.9m
  • Height 2.0m
  • Diameter of working area 200 mm, height 400 mm

The following options are available for the CX-30:

  • Activation of oxygen plasma
  • PE-CVD module for the deposition of multilayer composite thin films of Parylene and Ceramic.
  • Automated Nitrogen Refill
  • Thermo-regulated reactor chamber
  • Clean room interface
  • Specific coating device


Consumables for parylene deposition can be purchased at COAT-X, such as parylene-C, parylene-VT4 and parylene-AF4 dimer granules or ceramic precursors.


The CX-30 produces thin hermetic parylene films to protect sensitive products against moisture such as:

  • Printed circuit boards (PCB and PCBA)
  • Sensors and actuators
  • MEMS
  • LEDs
  • Medical equipement


Additionally, the thin parylene film provides a biocompatible surface for implantable devices, such as:

  • Cardiovascular stents
  • Heart monitoring systems
  • Intraocular pressure control
  • Intragastric balloon

COAT-X takes care of:

  • Development of an optimal deposition recipe
  • Design and production of fixtures
  • Supply of consumables and spare parts
  • FAT and SAT qualifications
  • Process validation support
  • Repair and service on demand
  • Worldwide delivery

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