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CX-300 Parylene Coater

Medium Size CVD Coating Machine for Parylene Thin Film Production

CX-300 parylene coater is a low temperature CVD coating machine with 300L reactor volume to produce parylene thin films. It is fully automated and incorporates surface activation processes.

The CX-300 can be integrated into electronic or medical device or semiconductor production lines. The machine can easily be coupled to clean rooms.

The CVD Parylene coater is also available in smaller (CX-30) and larger (CX-600) models.

Medium parylene coater CX-30 by COAT-X for parylene thin films
Medium parylene coater CX-30 by COAT-X for parylene thin films

CX-300 was designed by COAT-X for the production of high quality parylene conformal coatings. It is the result of more than 10 years of intense research and development. CX-300 produces high quality pinhole-free parylene conformal coatings from 100 nm to 40 um with very precise deposition rate control.

Parylene thin films produced with CX-300 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility and chemical stability.

CX-300 is well adapted for the production of Parylene conformal coatings on printed circuit boards (PCB, PCBA). The large chamber allows coating of large PCBs, up to 50 cm.


CX-300 is a low temperature CVD coating machine specifically designed for the deposition of thin layers of Parylene, it integrates:

  • Evaporator oven
  • Pyrolysis furnace with quartz tube
  • Front loading deposit chamber
  • Deposit turntable
  • Injection of adhesion promoter
  • Cold traps
  • Pumping units
  • Control unit
  • Human Machine Interface Software
  • PC and screen on adjustable arm

The CX-300 is a compact Parylene enrober, it fits easily into a production line, its size is:

  • Length 2.5m
  • Width 1.2m
  • Height 2.0m
  • Diameter of working area 600 mm, height 500 mm

The following options are available for the CX-300:

  • Activation of oxygen plasma
  • PE_CVD module for the deposition of multilayer composite thin films of Parylene and Ceramic.
  • Automated Nitrogen Refill
  • Thermo-regulated reactor chamber
  • Clean room interface
  • Specific coating device


Consumables for parylene deposition can be purchased through COAT-X, such as Parylene-C, Parylene-VT4 and Parylene-AF4 dimer granules or ceramic precursors.


The CX-300 produces hermetic parylene thin films to protect sensitive products against moisture such as:

  • Printed circuit boards (PCB and PCBA)
  • Sensors and actuators
  • MEMS
  • LEDs
  • Medical equipement


Additionally, the thin parylene film provides a biocompatible surface for implantable devices, such as

  • Cardiovascular stents
  • Heart monitoring systems
  • Intraocular pressure control
  • Intragastric balloon

COAT-X takes care of:

  • Development of an optimal coating recipe
  • Design and production of coating fixtures
  • Supply of consumables and spare parts
  • FAT and SAT qualifications
  • Process validation support
  • Repair and service on demand
  • Worldwide delivery

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