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Großformatige Parylene-Beschichtungsanlage CX-600 von COAT-X für Parylene-Dünnschichten
machine

CXP-600

CVD-Parylene-Abscheidungsanlage für große Werkstücke

The CX-600 Parylene Coater is a low-temperature CVD coating machine with a reactor volume of 600 L for the production of parylene thin films . It is fully automated and integrates surface activation processes.

The CX-600 can be integrated into production lines for electronic or medical devices or semiconductors. The machine can be easily connected to clean rooms.

The CVD Parylene coater is also available in smaller versions ( CX-30 und CX-300 ).

Großformatige Parylene-Beschichtungsanlage CX-600 von COAT-X für Parylene-Dünnschichten

CX-600 was developed by COAT-X for the production of high-quality  parylene protective coatings  . It is the result of more than 10 years of intensive research and development. CX-600 produces high-quality, pinhole-free parylene protective coatings from 100 nm to 40 µm with very precise deposition rate control.

Parylene thin films produced with the CX-600 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility, and chemical stability.

KEY FEATURES

The CX-600 is a low-temperature CVD coating machine specifically designed for the deposition of thin parylene films. It integrates:

  • Evaporator oven
  • Pyrolysis furnace with quartz tube
  • Front loader separation chamber
  • Large turntable
  • Injection of adhesion promoter
  • Cold traps
  • Pump units
  • Regulatory unit
  • Human-machine interface software
  • PC and screen on adjustable arm
SYSTEM SPECIFICATIONS

The CX-600 is a compact Parylene coater, it can be easily integrated into a production line, its footprint is:

  • Length 220 cm (86.6 in)
  • Width 160 cm (63.0 in)
  • Height 200 cm (78.7 in)

 

Usable volume for coating:

  • Diameter 60 cm (23.6 in)
  • Height 120 cm (47.2 in)
AVAILABLE OPTIONS

The following options are available for the CX-600:

  • Oxygen plasma activation
  • PE_CVD module for the deposition of multilayer composite thin films of parylene and ceramic.
  • Automatic nitrogen refill
  • Thermoregulated reactor chamber
  • Interface to the cleanroom
  • Specific coating device

 

Consumables for parylene deposition can be purchased from COAT-X, such as Parylene-C, Parylene-VT4 and Parylene-AF4 dimer granules or ceramic precursors.

APPLICATIONS

The CX-600 produces hermetic Parylene thin films to protect sensitive products from moisture, such as:

  • Printed circuit boards (PCB and PCBA)
  • Sensors and actuators
  • MEMS
  • LEDs
  • Medical devices

 

In addition, the Parylene thin film provides a biocompatible surface for implantable devices such as

  • Cardiovascular stents
  • Cardiac monitoring systems
  • Control of intraocular pressure
  • Intragastric balloon
SERVICES

COAT-X takes care of:

  • Development of an optimal coating formulation
  • Design and production of coating devices
  • Supply of consumables and spare parts
  • FAT and SAT qualifications
  • Support with process validation
  • Repair and service on request
  • Worldwide delivery
Get a quote for CXP-600

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