Parylene is a polymer that cannot be applied by brush, dipping, or spraying. It forms directly on the part to be protected, molecule by molecule, from a vapor. This process, developed by William Gorham in the 1960s, takes place under vacuum and consists of three successive steps, each in a separate zone of the machine. Parylene is deposited by a three-step CVD (Chemical Vapour Deposition) process carried out under vacuum. This unique process, solvent-free, catalyst-free, at room temperature allows it to uniformly coat all surfaces, including complex 3D geometries, cavities, and sub-surfaces.
The parylene coating process is a three-stage vacuum CVD process. Each stage has distinct thermodynamic and kinetic characteristics.
Everything starts with the dimer, a white crystalline powder of a di-molecule of parylene.
This powder is placed in a furnace called the vaporizer, heated to about 120–170 °C under vacuum. At this temperature, the dimer does not melt: it sublimes, meaning it goes directly from solid to gas, like dry ice.
The result is a dimer vapor, still chemically stable and non-reactive.
The dimer vapor then passes through a tube heated to a very high temperature, around 650–690 °C: the pyrolysis oven.
The thermal energy is high enough to break the two carbon-carbon bonds that hold the two halves of the dimer together. Each dimer molecule splits into two identical monomers.
This monomer is an extremely reactive intermediate: all it wants to do is bond with other monomers to form long polymer chains.
The gaseous monomer finally reaches the deposition chamber, kept at room temperature (about 25 °C) and under a vacuum.
On contact with the cold surfaces, the monomers condense and polymerize spontaneously: they link together into polymer chains, forming a solid film of parylene.
This is where the real strength of the process lies. Since the monomer is a gas that moves freely, it reaches everywhere: into cavities, under components, into gaps only a few micrometers wide.
The film therefore grows perfectly conformally, with a uniform thickness on every surface of the part, even the most complex geometries.
The vapor-phase surface polymerization requires no solvent, no initiator, no catalyst, and occurs at room temperature on the substrate. It is suitable for the most sensitive components: electronics, sensors, implantable medical devices. The resulting film is exceptionally pure (>99.9wt%), defect-free, and grows simultaneously on all exposed surfaces regardless of geometry, including re-entrant features, capillary gaps, and the undersides of components, a conformality that no liquid-applied coating can replicate.
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